Reaction kinetics of photoactive defects in semiconductor dissolution
نویسندگان
چکیده
منابع مشابه
Catalysis Reaction Kinetics of Photoactive Defects in Semiconductor
Uniformity and predictability are the principal qualities sought for all wet chemical etches. The establishment of these qualities, however, is hindered by a number of factom; such as nonuniformities in the starting material and random fluctuations in the local temperature and reactant concentration, which can lead to variations in etch rate across the surface of a wafer. The effects of variati...
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ژورنال
عنوان ژورنال: AIChE Journal
سال: 1996
ISSN: 0001-1541,1547-5905
DOI: 10.1002/aic.690420816